Thermal Mass Flow Meters for Clean, Sanitary and Ultra High Pure Applications
Thermal Instrument Mass Flow Meters have been used across many industries in a variety of liquid and gas applications. We introduced our unobstructed in-line model for sanitary, clean, and ultra-high pure applications in the 1980’s. Since then, they have been utilized in pharmaceutical, semiconductor, and numerous food and beverage applications to name a few. The flow element can be supplied with an integral or choice of remote electronic transmitters that provide Flow, Totalized Flow, and Temperature outputs. Upon request, Thermal Instrument can deliver a flow instrument that has been cleaned, pressure, and particle tested in a Class 100 Cleanroom.
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FOR YOUR SANITARY OR ULTRA HIGH PURE FINISH REQUIREMENT
Key Features
- Measurement of both Gases & Liquids
- Available as Flow Switch
- 316L Electro-Polished Stainless-Steel Material
- 10—15 RA Internal Finish
- Robust Welded Construction
- “CIP / SIP” Clean in place design
- 100:1 Turndown Available
- Unobstructed Flow Thru Tube
- No Moving Parts
- Negligible Pressure Drop
- Tri-Clamp, VCO, VCR, and Stub Weld Process Connections
- Available in sizes from ⅛” OD to 4” OD Tube
- Designed & Manufactured in the USA
Proven Success in the following Applications & Processes:
- DI Water for CIP processes
- UHP & Clean Gas Measurement
- Semiconductor processes
- Pharmaceutical processes
- Food & Beverage processes
Performance:
- Media: Liquid or Gas
- Accuracy: ± .50% of Full Scale or 2% of Reading. Full Scale over calibrated range.
- Repeatability: ± 0.2% of Rate
- Response Time: 1 to 2 Seconds for Gases. < 500ms for Liquids.
- Turndown: Up to 100:1
- Fluid Temperature: Span ± 50°F from operating temperature
Design:
- Material: 316L Electro-Polished Stainless Steel
- Internal Finish: 10—15 RA
- Sizing: ⅛” to 4” Tubing
- Flow Path: Unobstructed
- Connections: Tri-Clamp, VCO, VCR, and Tube Ends
Electronic Transmitter:
- Mounting: Integral (Model # 9500PI) or Remote (Model # 9500PR, 9200B, 926A)
- Outputs: Flow, Totalized Flow, and Temperature
- Output Signal: 4-20mADC, Pulse, Hart, RS485 Modbus
- Display: 8 Digit Flow & Totalized Flow
- Optional programmable transmitter to allow changes to Line Size, Filter Factor, Flow Factor, and Flow Cutoff Factor.



