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Thermal Mass Flow Meters MODEL# 600-9SAN & 600-9UHP

Thermal Mass Flow Meters for Clean, Sanitary and Ultra High Pure Applications

Thermal Instrument Mass Flow Meters have been used across many industries in a variety of liquid and gas applications. We introduced our unobstructed in-line model for sanitary, clean, and ultra-high pure applications in the 1980’s. Since then, they have been utilized in pharmaceutical, semiconductor, and numerous food and beverage applications to name a few. The flow element can be supplied with an integral or choice of remote electronic transmitters that provide Flow, Totalized Flow, and Temperature outputs. Upon request, Thermal Instrument can deliver a flow instrument that has been cleaned, pressure, and particle tested in a Class 100 Cleanroom.


Key Features

  • Measurement of both Gases & Liquids
  • Available as Flow Switch
  • 316L Electro-Polished Stainless-Steel Material
  • 10—15 RA Internal Finish
  • Robust Welded Construction
  • “CIP / SIP” Clean in place design
  • 100:1 Turndown Available
  • Unobstructed Flow Thru Tube
  • No Moving Parts
  • Negligible Pressure Drop
  • Tri-Clamp, VCO, VCR, and Stub Weld Process Connections
  • Available in sizes from ⅛” OD to 4” OD Tube
  • Designed & Manufactured in the USA

Proven Success in the following Applications & Processes:

  • DI Water for CIP processes
  • UHP & Clean Gas Measurement
  • Semiconductor processes
  • Pharmaceutical processes
  • Food & Beverage processes


  • Media: Liquid or Gas 
  • Accuracy: ± .50% of Full Scale or 2% of Reading. Full Scale over calibrated range. 
  • Repeatability: ± 0.2% of Rate 
  • Response Time: 1 to 2 Seconds for Gases. < 500ms for Liquids. 
  • Turndown: Up to 100:1 
  • Fluid Temperature: Span ± 50°F from operating temperature 


  • Material: 316L Electro-Polished Stainless Steel 
  • Internal Finish: 10—15 RA 
  • Sizing: ⅛” to 4” Tubing 
  • Flow Path: Unobstructed 
  • Connections: Tri-Clamp, VCO, VCR, and Tube Ends 

Electronic Transmitter:

  • Mounting: Integral (Model # 9500PI) or Remote (Model # 9500PR, 9200B, 926A) 
  • Outputs: Flow, Totalized Flow, and Temperature 
  • Output Signal: 4-20mADC, Pulse, Hart, RS485 Modbus 
  • Display: 8 Digit Flow & Totalized Flow  
  • Optional programmable transmitter to allow changes to Line Size, Filter Factor, Flow Factor, and Flow Cutoff Factor.  
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